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US 6,578,264 B1Granted
Method for constructing a membrane probe using a depression
AssigneeCascade Microtech, Inc.
InventorsReed Gleason, Michael A. Bayne, Kenneth Smith
Life of this patent
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Abstract
A method for constructing a membrane probe that includes providing a substrate, and creating a depression within the substrate. Conductive material is located within the depression and a conductive trace is connected to the conductive material. A membrane is applied to support the conductive material and the substrate is removed from the conductive material.
Claims40
A method of constructing a membrane probe comprising:
- (a) providing a substrate;
- (b) creating a depression within said substrate;
- (c) locating conductive material within said depression;
- (d) connecting a conductive trace to said conductive material;
- (e) applying a membrane to support said conductive material;
- and
- (f) removing said substrate from said conductive material.
4 more elements
A method of creating a probe comprising:
- (a) providing a substrate;
- (b) overlaying a layer on said substrate and thereafter patterning said layer to define a plurality of openings therein;
- (c) creating a set of depressions within said openings after said layer is said patterned;
- (d) locating conductive material within said depressions;
- and
- (e) removing said substrate from said conductive material.
3 more elements
A method of creating a probe comprising:
- (a) providing a substrate;
- (b) creating a set of depressions within said substrate having at least one sidewall that is independent of the crystalline structure of said substrate;
- (c) locating conductive material within said depressions;
- and
- (d) removing said substrate from said conductive material.
2 more elements
Dependencies are inferred from the claim text.