Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose
AssigneeBrewer Science Inc.
InventorsJames D. Meador, Mandar R. Bhave
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Abstract
New polymers and anti-reflective compositions including those polymers are provided. The polymer comprises recurring monomers according to the formula wherein each R is —OH, —CH2OH, —O—R1—O—X, or —CH2—O—R1—O—X, each R1 is a branched or unbranched alkyl group, and each X is shown below. The inventive compositions can be used to form anti-reflective coatings having high etch rate and optical densities.
Claims27
In an anti-reflective composition for protecting a base material or holes formed in a base material, the composition including a polymer dissolved in a solvent system, the improvement which comprises said polymer comprising a hydroxyalkyl cellulose reacted with an aryl isocyanate.
The combination of a substrate having a surface and a cured protective layer on said substrate surface, said cured protective layer being formed from a composition comprising a polymer comprising hydroxyalkyl cellulose reacted with an aryl isocyanate.
A method of forming a polymer useful in anti-reflective compositions utilized in microlithographic processes, said method comprising the step of reacting an aryl isocyanate with a hydroxyalkyl cellulose in a solvent system, wherein the solvent system includes PGMEA.
A method of forming a polymer useful in anti-reflective compositions utilized in microlithographic processes, said method comprising the steps of:
- reacting an aryl isocyanate with a hydroxyalkyl cellulose so that the carbon atom of the C═O group of the isocyanate bonds to an —OH group of the hydroxyalkyl cellulose to yield a urethane linkage therebetween;
- and
- reacting a second isocyanate with the urethane linkage.
Dependencies are inferred from the claim text.