Multiple blade robot adjustment apparatus and associated method
AssigneeApplied Materials, Inc.
InventorsDonald J. Olgado, Avi Tepman, Timothy J. Franklin
Life of this patent
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Abstract
The present invention provides an apparatus and associated method in which the apparatus comprises a multiple blade robot and a compensating device. The multiple blade robot includes at least one set of robot blades. The compensating device adjusts for differences in spacing between the set of robot blades and spacing between two or more cells. In different embodiments, the compensating device may be coupled to one or more of the process cells, one or more of the substrate holder systems, or one or more of the robot blades.
Claims38
A semiconductor processing apparatus that connects a first object to a second object, the apparatus comprising:
- a compensating device connecting the first object to the second object within a plane defined by a first direction and a second direction, the compensating device provides for displacement of the first object relative to the second object in the first direction and in the second direction wherein the second direction is substantially perpendicular to the first direction.
An apparatus that connects a cell to a cell mount, the apparatus comprising:
- a compensating device connecting the cell to the cell mount within a plane defined by a first direction and a second direction, the compensating device provides for displacement of the cell relative to the cell mount in the first direction and in the second direction wherein the second direction is substantially perpendicular to the first direction.
An apparatus that connects a substrate holder system to a cell, the apparatus comprising:
- a compensating device connecting the substrate holder system to the cell within a plane defined by a first direction and a second direction, the compensating device provides for displacement of the substrate holder system relative to the cell in the first direction and in the second direction wherein the second direction is substantially perpendicular to the first direction.
An apparatus comprising:
- a multiple blade robot including at least one set of robot blades;
- and
- a compensating device that adjusts for differences between a robot blade spacing provided between the set of robot blades and a cell spacing provided between a set of cells.
A method that adjusts a robot blade spacing provided between a first robot blade and a second robot blade to a cell spacing provided between a first cell and a second cell, the method comprises:
- determining the cell spacing;
- compensating for differences between the robot blade spacing and the cell spacing;
- and
- aligning the first robot blade with the first cell.
A semiconductor processing apparatus that connects a first object to a second object, the apparatus comprising:
- a compensating device connecting the first object to the second object within a plane defined by a first direction and a second direction, the compensating device comprising a circumferential mount attached to one of the first object or the second object, a flexure segment attached to one of the first object or the second object that is not attached to the circumferential mount and providing for displacement of the first object relative to the second object in the first direction and in the second direction wherein the second direction is substantially perpendicular to the first direction.
An apparatus connecting a cell to a cell mount, the apparatus comprising:
- a compensating device connecting the cell to the cell mount within a plane defined by a first direction and a second direction, the compensating device comprising a circumferential mount attached to one of the cell or the cell mount, a flexure segment attached to one of the cell or the cell mount that is not attached to the circumferential mount and providing for displacement of the cell relative to the cell mount in the first direction and in the second direction wherein the second direction is substantially perpendicular to the first direction.
An apparatus that connects a substrate holder system to a cell, the apparatus comprising:
- a compensating device connecting the substrate holder system to the cell within a plane defined by a first direction and a second direction, the compensating device comprising a circumferential mount attached to one of the substrate holder system of the cell, a flexure segment attached to one of the substrate holder system of the cell that is not attached to the circumferential mount and providing for displacement of the substrate holder system relative to the cell in the first direction and in the second direction wherein the second direction is substantially perpendicular to the first direction.
Dependencies are inferred from the claim text.