Ink-jet head, method of producing the same, and ink-jet printing system including the same

An ink-jet head comprising:

• a nozzle discharging an ink drop to a recording medium;
• a discharging chamber communicating with the nozzle and containing ink therein;
• an oscillation plate provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated;
• and
• an electrode provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode, the electrode actuating the oscillation plate by electrostatic force upon application of a driving voltage to the electrode;
• wherein the first substrate is bonded to the second substrate via a silicon oxide film, the silicon oxide film being provided to have a lowered melting point that allows the bonding of the first and second substrates at a temperature lower than 1000 deg. C.

An ink-jet head comprising:

• a nozzle discharging an ink drop to a recording medium;
• a discharging chamber communicating with the nozzle and containing ink therein;
• an oscillation plate provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated;
• and
• an electrode provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode, the electrode actuating the oscillation plate by electrostatic force upon application of a driving voltage to the electrode;
• wherein the first substrate is bonded to the second substrate via a silicon oxide layer, the silicon oxide layer containing phosphorus and/or boron on a surface thereof where the first substrate and the second substrate are bonded together.

An ink-jet printing system in which an ink-jet head is provided, said ink-jet head comprising:

• a nozzle discharging an ink drop to a recording medium;
• a discharging chamber communicating with the nozzle and containing ink therein;
• an oscillation plate provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated;
• and
• an electrode provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode, the electrode actuating the oscillation plate by electrostatic force upon application of a driving voltage to the electrode;
• wherein the first substrate is bonded to the second substrate via a silicon oxide layer, the silicon oxide layer containing phosphorus and/or boron on a surface thereof where the first substrate and the second substrate are bonded together.

An ink-jet head comprising:

• a nozzle discharging an ink drop to a recording medium;
• a discharging chamber communicating with the nozzle and containing ink therein;
• an oscillation plate provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated;
• an electrode provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode, the electrode actuating the oscillation plate by electrostatic force upon application of a driving voltage to the electrode;
• and
• a spacer provided on the second substrate such that the spacer forms the gap between the oscillation plate and the electrode, the spacer having a silicon oxide layer where the first substrate is bonded to the second substrate via the spacer, the silicon oxide layer being provided to have a lowered melting point that allows the bonding of the first substrate and the second substrate at a temperature lower than 1000 deg. C.

An ink-jet head comprising:

• a nozzle discharging an ink drop to a recording medium;
• a discharging chamber communicating with the nozzle and containing ink therein;
• an oscillation plate provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated;
• an electrode provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode, the electrode actuating the oscillation plate by electrostatic force upon application of a driving voltage to the electrode;
• and
• a spacer provided on the second substrate such that the spacer forms the gap between the oscillation plate and the electrode, the spacer having a silicon oxide layer thereon, the silicon oxide layer containing phosphorus and/or boron on a surface thereof where the first substrate is bonded to the second substrate via the spacer.

An ink-jet head comprising:

• a nozzle discharging an ink drop to a recording medium;
• a discharging chamber communicating with the nozzle and containing ink therein;
• an oscillation plate provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated;
• an electrode provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode, the electrode actuating the oscillation plate by electrostatic force upon application of a driving voltage to the electrode;
• and
• a spacer provided on the second substrate such that the spacer forms the gap between the oscillation plate and the electrode, the spacer having a silicon oxide film on a surface thereof where the first substrate is bonded to the second substrate via the spacer, and a dummy groove being provided on the silicon oxide film.

An ink-jet printing system in which an ink-jet head is provided, said ink-jet head comprising:

• a nozzle discharging an ink drop to a recording medium;
• a discharging chamber communicating with the nozzle and containing ink therein;
• an oscillation plate provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated;
• an electrode provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode, the electrode actuating the oscillation plate by electrostatic force upon application of a driving voltage to the electrode;
• and
• a spacer provided on the second substrate such that the spacer forms the gap between the oscillation plate and the electrode, the spacer having a silicon oxide layer on a surface thereof where the first substrate is bonded to the second substrate via the spacer.