Method of manufacturing the dielectric waveguide
AssigneeMurata Manufacturing Co., Ltd.
InventorToshikazu Takeda
Life of this patent
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Abstract
The present invention provides a method of efficiently manufacturing a dielectric waveguide with high reliability and precision. In the method, a resist material is formed on the outer surface of a green compact provided with a removal inhibiting layer, and predetermined portion of the green compact defined by the resist material is removed by the sand blasting method using the resist material as a mask, until the removal inhibiting layer is exposed to obtain a shaped green compact structure. The thus-obtained structure is fired to obtain a sintered body which comprises a dielectric strip and a wing.
Claims8
A method of manufacturing a dielectric waveguide comprising a plurality of conductors having substantially parallel planes, a dielectric strip arranged between the planes of the plurality of conductors, and a wing integrally formed with the dielectric strip to extend from the dielectric strip along each of the planes of the conductors, the method comprising the steps of:
- preparing a green compact containing an inorganic powder and an organic binder for forming the dielectric strip and the wing from a part of the green compact;
- wherein the step of preparing the green compact includes the step of providing a removal inhibiting layer comprising a difficult-to-remove material having a lower removal rate than that of the green compact in the part of the green compact corresponding to the wing;
- forming a resist material on an outer surface of the green compact, a position of the resist material defining an opening corresponding to the wing;
- removing a portion of the green compact, which is exposed through the opening, to a desired amount until the removal inhibiting layer is exposed, by using the resist material as a mask to form an unfired structure having a shape comprising the dielectric strip and the wing;
- removing the resist material;
- firing the unfired structure to obtain a sintered body having the dielectric strip and the wing;
- providing one of the plurality of conductors on a surface of the sintered body opposite the dielectric strip;
- and
- arranging two sintered bodies in a state in which respective dielectric strips of the two sintered bodies are opposed to each other.
Dependencies are inferred from the claim text.