Method and apparatus for monitoring consumable performance
AssigneeAdvanced Micro Devices, Inc.
InventorsWilliam J. Campbell, Jeremy Lansford, Michael R. Conboy
Life of this patent
Estimating the term…
Abstract
A method for monitoring consumable performance in a processing tool comprises storing a performance model of the processing tool; receiving a consumable item characteristic of a consumable item in the processing tool; determining a predicted processing rate for the processing tool based on the consumable item characteristic and the performance model; determining an actual processing rate of the processing tool; and determining a replacement interval for the consumable item based on at least the actual processing rate. A processing system includes a processing tool and an automatic process controller. The processing tool is adapted to process wafers and includes a consumable item.
Claims38
A method for monitoring consumable performance in a processing tool, comprising:
- storing a performance model of the processing tool;
- receiving a consumable item characteristic of a consumable item in the processing tool;
- determining a predicted processing rate for the processing tool based on the consumable item characteristic and the performance model;
- determining an actual processing rate of the processing tool;
- and
- determining a replacement interval for the consumable item based on at least the actual processing rate.
A processing system, comprising:
- a processing tool adapted to process wafers, the processing tool including a consumable item;
- and
- a processing device programmed with instructions that, when executed, perform a method for monitoring consumable performance in the processing tool, the method including:
- storing a performance model of the processing tool;
- receiving a consumable item characteristic of a consumable item in the processing tool;
- determining a predicted processing rate for the processing tool based on the consumable item characteristic and the performance model;
- determining an actual processing rate of the processing tool;
- and
- determining a replacement interval for the consumable item based on at least the actual processing rate.
A processing system, comprising:
- a processing tool adapted to process wafers, the processing tool including a consumable item;
- and
- an automatic process controller adapted to store a performance model of the processing tool, receive a consumable item characteristic of the consumable item in the processing tool, determine a predicted processing rate for the processing tool based on the consumable item characteristic and the performance model, determine an actual processing rate of the processing tool, and determine a replacement interval for the consumable item based on at least the actual processing rate.
A processing system, comprising:
- a processing tool adapted to process wafers, the processing tool including a consumable item;
- means for storing a performance model of the processing tool;
- means for receiving a consumable item characteristic of a consumable item in the processing tool;
- means for determining a predicted processing rate for the processing tool based on the consumable item characteristic and the performance model;
- means for determining an actual processing rate of the processing tool;
- and
- means for determining a replacement interval for the consumable item based on at least the actual processing rate.
Dependencies are inferred from the claim text.