Method and apparatus for parsing event logs to determine tool operability
AssigneeAdvanced Micro Devices, Inc.
InventorsAnastasia Oshelski Peterson, Richard Edwards
Life of this patent
Estimating the term…
Abstract
A method for determining operability of a tool includes generating an event log including a plurality of events associated with the operation of the tool; parsing the event log to identify a crucial event; and initiating an automatic corrective action in response to identifying a crucial event. A manufacturing system includes a tool and a tool monitor. The tool is adapted to generate an event log including a plurality of events associated with the operation of the tool. The tool monitor is adapted to parse the event log to identify a crucial event and initiate an automatic corrective action in response to identifying a crucial event.
Claims33
A method for determining operability of a tool, comprising:
- defining a plurality of crucial events;
- generating an event log including a plurality of events associated with the operation of the tool;
- autonomously parsing the event log to identify one of the plurality of crucial events;
- and
- initiating an automatic corrective action in response identifying the crucial event.
A manufacturing system, comprising:
- a tool adapted to generate an event log including a plurality of events associated with the operation of the tool;
- and
- a tool monitor adapted to autonomously parse the event log to identify a crucial event from a plurality of defined crucial events and initiate an automatic corrective action in response to identifying the crucial event.
A program storage device encoded with instructions, that when executed by a computer, perform a method for determining operability of a tool, the method comprising:
- accessing an event log, the event log including a plurality of events associated with the operation of the tool;
- autonomously parsing the event log to identify a crucial event from a plurality of defined crucial events;
- and
- initiating an automatic corrective action in response to identifying the crucial event.
A manufacturing system, comprising:
- a tool;
- means for defining a plurality of crucial events;
- means for accessing an event log, the event log including a plurality of events associated with the operation of the tool;
- means for parsing the event log to identify a crucial event;
- and
- means for initiating an automatic corrective action in response to identifying the crucial event.
A method for determining operability of a tool, comprising:
- defining a plurality of crucial events;
- generating an event log including a plurality of events associated with the operation of the tool;
- autonomously parsing the event log to identify one of the plurality of crucial events;
- and
- automatically inhibiting subsequent operation of the tool in response to identifying the crucial event.
A manufacturing system, comprising:
- a tool adapted to generate an event log including a plurality of events associated with the operation of the tool;
- and
- a tool monitor adapted to autonomously parse the event log to identify a crucial event from a plurality of defined crucial events and automatically inhibit subsequent operation of the tool in response to identifying the crucial event.
A program storage device encoded with instructions, that when executed by a computer, perform a method for determining operability of a tool, the method comprising:
- accessing an event log, the event log including a plurality of events associated with the operation of the tool;
- autonomously parsing the event log to identify a crucial event from a plurality of defined crucial events;
- and
- automatically inhibiting subsequent operation of the tool in response to identifying the crucial event.
Dependencies are inferred from the claim text.