Polished polymide substrate
OwnerJohn Farah, Venkatapuram S. Sudarshanaminventors
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Abstract
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
Claims54
A substrate for a circuit structure comprising:
- a planar substrate mass of polyimide material having a first side and a second side, said first side being polished to a surface smoothness between about 0.5 μinch and 100 μinch, capable of receiving a circuit structure.
A method of preparing a substrate for a circuit structure comprising:
- providing a planar substrate mass of polyimide material having a first side and a second side;
- and
- polishing said first side to a surface smoothness between about 0.5 μinch and 100 μinch.
A method of forming a groove having a precise depth and width in a planar substrate mass of polyimide material comprising:
- providing a planar substrate mass of polyimide material having a first side and a second side;
- polishing said first side to a surface smoothness between about 0.5 μinch and 100 μinch;
- and
- cutting said first side of said planar substrate mass using a pulsed laser, said pulsed laser outputting a predetermined number of pulses to form a groove having a depth and a width capable of receiving an optical fiber.
Dependencies are inferred from the claim text.