Small internal volume fluid mass flow control apparatus

A fluid mass flow control apparatus for controlling relatively low flow rates of fluid in a process, comprising:

• a first elongated flow tube having an inlet end and a discharge end;
• a second elongated flow tube having an inlet end and a discharge end;
• a valve capsule housing including a chamber formed therein;
• said first and second flow tubes being connected at their inlet ends to a source of pressure fluid and said first and second flow tubes being connected at their discharge ends to said capsule housing;
• a valve closure member disposed in said capsule housing and engageable with a valve seat;
• a conduit member forming an elongated flow passage in fluid flow communication with said capsule housing and with a discharge coupling member of sad apparatus;
• an actuator including an actuator member operably engageable with said closure member to move said closure member relative to said valve seat to control flow of fluid through said apparatus;
• and
• a magnetic coil disposed in proximity to said actuator member for causing said actuator member to effect movement of said closure member;
• wherein said actuator member includes an elongated elastically deflectable actuator tube containing magnetostrictive material;
• and
• wherein said capsule housing is supported by an elongatable member operable to move said capsule housing and said closure member with respect to said actuator member.