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US 6,560,504 B1Granted
Use of contamination-free manufacturing data in fault detection and classification as well as in run-to-run control
AssigneeAdvanced Micro Devices, Inc.
InventorsThomas J. Goodwin, Iraj Emami, Charles E. May
Life of this patent
Estimating the term…
Abstract
A method is provided for manufacturing, the method including processing a workpiece in a processing step, detecting defect data after the processing of the workpiece in the processing step has begun and forming an output signal corresponding to at least one type of defect based on the defect data. The method also includes feeding back a control signal based on the output signal to adjust the processing performed in the processing step to reduce the at least one type of defect.
Claims13
A method of manufacturing, the method comprising:
- processing a workpiece in a processing step;
- detecting defect data after the processing of the workpiece in the processing step has begun;
- forming an output signal corresponding to at least one type of defect based on the defect data, wherein the formation of the output signal includes counting the number of the at least one type of defect and determining a surface density of the at least one type of defect as a function of time;
- and
- feeding back a control signal based on the output signal to adjust the processing performed in the processing step to reduce the at least one type of defect.
2 more elements
A method of manufacturing, the method comprising:
- processing a first workpiece in a processing step;
- detecting at least one type of defect in an inspection step after the processing of the first workpiece in the processing step;
- forming an output signal corresponding to at least one type of detected defect, wherein the formation of the output signal includes counting the number of the at least one type of defect and determining a surface density of the at least one type of defect as a function of time;
- and
- feeding back a control signal based on the output signal to adjust the processing performed in the processing step on a second workpiece to reduce the at least one type of defect.
2 more elements
A method of manufacturing, the method comprising:
- processing a workpiece in a processing step;
- detecting defect data using an in situ sensor after the processing of the workpiece in the processing step has begun;
- forming an output signal corresponding to at least one type of defect based on the defect data, wherein the formation of the output signal includes counting the number of the at least one type of defect and determining a surface density of the at least one type of defect as a function of time;
- and
- feeding back a control signal based on the output signal to adjust the processing performed on the workpiece in the processing step to reduce the at least one type of defect.
2 more elements
A method of manufacturing, the method comprising:
- processing a workpiece in a processing step;
- detecting defect data after the processing of the workpiece in the processing step has begun;
- forming an output signal corresponding to at least one type of defect based on the defect data, wherein the formation of the output signal includes counting the number of the at least one type of defect, determining a surface density of the at least one type of defect as a function of time, counting the number of a second type of defect different than the at least one type of defect and determining a surface density of the second type of defect as a function of time;
- and
- feeding back a control signal when the number of the at least one type of defect is at least about a first predetermined value, when the surface density of the at least one type of defect is at least about a second predetermined value, when the number of the second type of defect is at least about a third predetermined value and when the surface density of the second type of defect is at least about a fourth predetermined value to adjust the processing performed in the processing step to reduce the at least one type of defect.
2 more elements
A method of manufacturing, the method comprising:
- processing a first workpiece in a processing step;
- detecting at least one type of defect in an inspection step after the processing of the first workpiece in the processing step;
- forming an output signal corresponding to at least one type of detected defect, wherein the formation of the output signal includes counting the number of the at least one type of defect, determining a surface density of the at least one type of defect as a function of time, counting the number of a second type of defect different than the at least one type of defect and determining a surface density of the second type of defect as a function of time;
- and
- feeding back a control signal when the number of the at least one type of defect is at least about a first predetermined value, when the surface density of the at least one type of defect is at least about a second predetermined value, when the number of the second type of defect is at least about a third predetermined value and when the surface density of the second type of defect is at least about a fourth predetermined value to adjust the processing performed in the processing step on a second workpiece to reduce the at least one type of defect.
2 more elements
A method of manufacturing, the method comprising:
- processing a workpiece in a processing step;
- detecting defect data using an in situ sensor after the processing of the workpiece in the processing step has begun;
- forming an output signal corresponding to at least one type of defect based on the defect data, wherein the formation of the output signal includes counting the number of the at least one type of defect, determining a surface density of the at least one type of defect as a function of time, counting the number of a second type of defect different than the at least one type of defect and determining a surface density of the second type of defect as a function of time;
- and
- feeding back a control signal when the number of the at least one type of defect is at least about a first predetermined value, when the surface density of the at least one type of defect is at least about a second predetermined value, when the number of the second type of defect is at least about a third predetermined value and when the surface density of the second type of defect is at least about a fourth predetermined value to adjust the processing performed on the workpiece in the processing step to reduce the at least one type of defect.
2 more elements
Dependencies are inferred from the claim text.