Method and apparatus for monitoring controller performance using statistical process control

An apparatus for monitoring controller performance using statistical process control analysis, comprising:

• a processing controller adapted to perform a fault detection analysis to reduce a bias in a manufacturing model performing a fault detection analysis on said process controller to reduce a bias in said manufacturing model, said fault detection analysis comprising performing said statistical process control analysis prior to performing a results versus prediction analysis;
• a processing tool coupled with said processing controller;
• a metrology tool interfaced with said processing tool;
• a control modification data calculation unit interfaced with said metrology and connected to said processing controller in a feedback manner;
• a predictor function interfaced with said processing controller;
• a statistical process control analysis unit interfaced with said predictor function and said processing tool;
• and
• a results versus prediction analysis unit interfaced with said statistical process control analysis unit and connected to said processing controller in a feedback manner.

An apparatus for monitoring controller performance using statistical process control analysis, comprising:

• means for defining a manufacturing model;
• means for performing a processing run of semiconductor devices as defined by said manufacturing model and implemented by a process controller;
• means for performing a fault detection analysis on said process controller to reduce a bias in said manufacturing model, performing said fault detection analysis comprises performing said statistical process control analysis prior to performing a results versus prediction analysis;
• and
• means for updating at least one control input signal generated by said process controller in response to said fault detection analysis.

A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method for monitoring controller performance using statistical process control analysis, comprising:

• defining a manufacturing model;
• performing a processing run of semiconductor devices as defined by said manufacturing model and implemented by a process controller;
• performing a fault detection analysis on said process controller to reduce a bias in said manufacturing model, performing said fault detection analysis comprises performing said statistical process control analysis prior to performing a results versus prediction analysis;
• and
• updating at least one control input signal generated by said process controller in response to said fault detection analysis.