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US 6,559,596 B1Granted
Getter, air tight chamber and image forming apparatus having getter, and manufacturing method of getter
AssigneeCanon Kabushiki Kaisha
InventorsYutaka Arai, Mitsutoshi Hasegawa, Kazuya Shigeoka
Life of this patent
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Abstract
A getter which can maintain an absorption ability and secure sufficient characteristics even when a high-temperature low-vacuum is experienced in a process as compared with a conventional getter. The getter has an undulation on the surface, and is formed by depositing Ti or a composition mainly containing Ti or Zr or a base surface mainly containing Zr.
Claims30
A getter comprising:
- a substrate;
- a surface being formed on said substrate and including at least one of Zr and Ti;
- and
- a getter layer formed on said surface.
1 more element
A getter comprising:
- a getter layer on a base surface containing a non-evaporable getter material.
A method of manufacturing a getter, comprising the steps of:
- forming a base surface containing at least one of Zr and Ti;
- and
- forming a getter layer on said base surface.
A method of manufacturing a getter, comprising the steps of:
- forming a base surface containing at least a non-evaporable getter material;
- and
- forming a getter layer on said base surface.
Dependencies are inferred from the claim text.