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US 6,558,239 B2Granted
Polishing apparatus
AssigneeEbara Corporation
InventorsJunji Kunisawa, Norio Kimura
Life of this patent
Estimating the term…
Abstract
A polishing apparatus has a feed reel for feeding a polishing tape wound thereon and having a polishing surface, a take-up reel for reeling up the polishing tape from the feed reel, a presser for pressing the polishing tape between the feed reel and the take-up reel against a surface, to be polished, of a workpiece, and a motor for rotating the take-up reel. The feed reel, the take-up reel, and the presser are housed in a cartridge, which is detachably held by a cartridge holder.
Claims14
A polishing apparatus comprising:
- a feed reel operable to feed a polishing tape wound thereon, said polishing tape having a polishing surface;
- a take-up reel operable to reel up said polishing tape from said feed reel;
- a presser operable to press said polishing tape between said feed reel and said take-up reel against a first surface, to be polished, of a workpiece;
- a motor operable to rotate said take-up reel;
- a cartridge housing said feed reel, said take-up reel, and said presser therein;
- and
- a cartridge holder operable to detachably hold said cartridge.
4 more elements
A polishing apparatus comprising:
- a feed reel operable to feed a polishing tape wound thereon, said polishing tape having a polishing surface;
- a take-up reel operable to reel up said polishing tape from said feed reel;
- a presser operable to press said polishing tape between said feed reel and said take-up reel against a surface, to be polished, of a workpiece;
- a motor operable to rotate said take-up reel;
- a cartridge housing said feed reel and said take-up reel, and having a recess in which said presser is disposed;
- and
- a cartridge holder operable to detachably hold said cartridge thereon.
4 more elements
Dependencies are inferred from the claim text.