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AssigneeApplied Materials, Inc.
InventorsMarvin L. Freeman, Jeffrey C. Hudgens, Damon Keith Cox, Chris Holt Pencis, Michael Rice, David A. Van Gogh
Estimating the term…
Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.
A method of determining a position of a robot, the method comprising:
A method of determining a position of a robot in a semiconductor processing system having a plurality of ports through which a substrate is passed, at least one process chamber coupled to one of the ports, the method comprising:
A computer-readable medium having stored thereon a plurality of instructions, the plurality of instructions including instructions which, when executed by a processor, determines a change in position of a robot in a semiconductor processing system comprising:
Dependencies are inferred from the claim text.