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US 6,556,765 B2Granted
Planar variable optical attenuator
AssigneeE-Tek Dynamics, Inc.
InventorsBrian Lee Heffner, Gokul Krishnan
Life of this patent
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Abstract
A planar optical attenuator designed as a MEMS structure has a mirror opposite an input and an output waveguide, and a TAB actuator for lateral displacement of the mirror relative to the input port and/or output port. The effective reflectivity of the mirror is variable as a function of the lateral location on the mirror. The optical attenuation is varied by varying the location on the mirror at which the optical beam is reflected.
Claims10
A planar optical attenuator comprising:
- a substantially planar substrate,
- an input port disposed to provide an input optical beam,
- a variable reflectivity mirror disposed substantially in the plane of the substrate, the mirror coupled to receive the input optical beam and to provide a reflected optical beam, the variability of the mirror being dependent on a place on the mirror,
- an output port disposed to receive at least part of the reflected optical beam, and
- an actuator for changing the position of the mirror relative to the direction of the input beam to vary the strength of the reflected optical beam.
2 more elements
Dependencies are inferred from the claim text.