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US 6,556,749 B2Granted
Array waveguide grating and method of manufacture thereof
AssigneeHitachi Cable, Ltd.
InventorsHisato Uetsuka, Masahiro Okawa, Koichi Maru, Takafumi Chiba
Life of this patent
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Abstract
The present invention relates to an array waveguide grating and a method of manufacture thereof, in which a substantially smooth wavelength-loss characteristics is obtained in a pass band, rather than increasing the loss. In an array waveguide grating (10), wavelength multiplex division signal light is demultiplexed by a channel waveguide array (15), reflected by a Fabry-Perot resonator array (16), and passed through the channel waveguide array (15) again, so that a substantially smooth wavelength-loss characteristic is obtained in the pass band, rather than increasing the loss.
Claims34
An array waveguide grating comprising:
- a substrate;
- an input channel waveguide formed on top of the substrate for receiving wavelength-multiplexed signal light at one end thereof;
- a plurality of output channel waveguides formed in parallel to the input channel waveguide for outputting split output signal light from respective one ends thereof;
- a fan-shaped slab waveguide, one end of which is connected to the other end of said input channel waveguide, and to the other ends of said output channel waveguides;
- an array of channel waveguides, one end of which is connected to the other end of the fan-shaped slab waveguide such that lengths of the channel waveguides are successively elongated by a desired variation ΔL;
- and
- a Fabry-Perot resonator array connected to the other end of the array of channel waveguides at one end thereof such that lengths of the resonators are successively elongated by twice said waveguide length variation ΔL.
4 more elements
An array waveguide grating comprising:
- a substrate;
- an input channel waveguide formed on top of the substrate for receiving wavelength-multiplexed signal light at one end thereof;
- an output channel waveguide disposed in parallel to the input channel waveguide for outputting split output signal light from one end thereof;
- a fan-shaped slab waveguide, one end of which is connected to the other end of said input channel waveguide, and to the other end of said output channel waveguide;
- a first array of channel waveguides, respective one ends of which are connected to the other end of the fan-shaped slab waveguide such that lengths of the channel waveguides are successively elongated by a desired variation ΔL;
- a second array of channel waveguides, respective one ends of which are connected to the other ends of the first array of channel waveguides such that lengths of the second channel waveguides are successively elongated by twice the waveguide length variation ΔL and such that the second channel waveguides are arranged in a semicircular and concentric shape;
- a first reflective film having a reflectance of approximately 11% and formed between the first array of channel waveguides and the second array of channel waveguides;
- and
- a second reflective film having a reflectance of approximately 100% and formed at the other end of the second array of channel waveguides.
6 more elements
An array waveguide grating comprising:
- a substrate;
- an input channel waveguide formed on top of this substrate for receiving wavelength-multiplexed signal light at one end thereof;
- an output channel waveguide disposed in parallel to the input channel waveguide for outputting split output signal light from one end thereof;
- a fan-shaped slab waveguide, one end of which is connected to the other end of said input channel waveguide, and to the other end of said output channel waveguide;
- a first array of channel waveguides, respective one ends of which are connected to the other end of the fan-shaped slab waveguide such that lengths of the channel waveguides are successively elongated by a desired variation ΔL;
- a second array of channel waveguides, respective one ends of which are connected to the other ends of the first array of channel waveguides such that lengths of the second channel waveguides are successively elongated by twice the waveguide length variation ΔL;
- a first groove formed so as to intersect with both the first and second arrays of channel waveguides at a connecting portion of the first and second arrays of channel waveguides;
- a first reflective film having a reflectance of approximately 11% and inserted inside the first groove;
- a second groove formed so as to intersect with the second array of channel waveguides midway;
- and
- a second reflective film having a reflectance of approximately 100%;
- and inserted in the second groove.
9 more elements
A method of manufacturing an array waveguide grating, comprising the steps of:
- providing an input channel waveguide on top of a first substrate for receiving wavelength-multiplexed signal light at one end thereof;
- providing a plurality of output channel waveguides on top of the first substrate and in parallel to the input channel waveguide for outputting split output signal light from respective one ends thereof;
- providing a fan-shaped slab waveguide on top of the first substrate such that one end thereof is connected to the other end of said input channel waveguide and to the other ends of said output channel waveguides;
- providing an array of channel waveguides on top of the first substrate such that lengths of the channel waveguides are successively elongated by a desired variation ΔL and such that the channel waveguides are connected to the other end of the fan-shaped slab waveguide;
- providing a Fabry-Perot resonator array on top of a second substrate such that lengths of the resonators are successively elongated by twice the waveguide length variation ΔL;
- and
- connecting the first substrate to the second substrate such that one end of the Fabry-Perot resonator array connects to the other end of said array of channel waveguides.
4 more elements
A method of manufacturing an array waveguide grating comprising the steps of:
- providing an input channel waveguide on a first substrate for receiving wavelength-multiplexed signal light at one end thereof;
- providing a plurality of output channel waveguides on the first substrate and in parallel to the input channel waveguide for outputting split output signal light from one end thereof;
- providing a fan-shaped slab waveguide on the first substrate such that one end thereof is connected to the other end of said input channel waveguide and the other ends of said output channel waveguides;
- providing a first array of channel waveguides on the first substrate such that lengths of the channel waveguides are successively elongated by a desired variation ΔL and such that one end of the first array of channel waveguides connects to the other end of the fan-shaped slab waveguide;
- providing a second array of channel waveguides on a second substrate such that lengths of the channel waveguides are successively elongated by twice the waveguide length variation ΔL and such that the second array of channel waveguides is arranged in a semicircular and concentric shape;
- providing a first reflective film having a reflectance of approximately 11% at one end of said second array of channel waveguides;
- providing a second reflective film having a reflectance of approximately 100% at the other end of said second array of channel waveguides;
- and
- connecting the first substrate to the second substrate such that the reflective film having a reflectance of approximately 11% is inserted between the other end of the first array of channel waveguides and one end of the second array of channel waveguides.
6 more elements
A method of manufacturing an array waveguide grating comprising the steps of:
- providing an input channel waveguide on a substrate for receiving wavelength-multiplexed signal light at one end thereof;
- providing a plurality of output channel waveguides on the substrate and in parallel to the input channel waveguide for outputting split output signal light from one end thereof;
- providing a fan-shaped slab waveguide on the substrate such that one end thereof is connected to the other end of said input channel waveguide and the other ends of said output channel waveguides;
- providing a first array of channel waveguides on the substrate such that lengths of the channel waveguides are successively elongated by a desired variation ΔL and such that one end of the first array of channel guides connects to the other end of the fan-shaped slab waveguide;
- providing a second array of channel waveguides on the substrate such that lengths of the second channel waveguides are successively elongated by twice the waveguide length variation ΔL and such that respective one ends of the second channel waveguides connect to the other ends of the first channel waveguides;
- providing a first groove in the substrate to intersect with both the first and second arrays of channel waveguides at a connecting portion of the first and second arrays of channel waveguides;
- inserting a first reflective film having a reflectance of approximately 11% in the first groove;
- providing a second groove in the substrate to intersect the second array of channel waveguides midway;
- and
- inserting a second reflective film having a reflectance of approximately 100% in the second groove.
7 more elements
Dependencies are inferred from the claim text.