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US 6,556,652 B1Granted
Measurement of critical dimensions using X-rays
AssigneeJordan Valley Applied Radiation Ltd.
InventorsIsaac Mazor, Boris Yokhin, Amos Gvirtzman
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Abstract
A method for measurement of critical dimensions includes irradiating a surface of a substrate with a beam of X-rays. A pattern of the X-rays scattered from the surface due to features formed on the surface is detected and analyzed to measure a dimension of the features in a direction parallel to the surface.
Claims40
A method for measurement of critical dimensions, comprising:
- irradiating a surface of a substrate with a beam of X-rays;
- detecting a pattern of the X-rays scattered from the surface due to features formed on the surface;
- and
- analyzing the pattern to measure a dimension of the features in a direction parallel to the surface.
1 more element
Apparatus for measurement of critical dimensions, comprising:
- an X-ray source, configured to irradiate a surface of a substrate with a beam of X-rays;
- a detector, adapted to detect a pattern of the X-rays scattered from the surface due to features formed on the surface and to generate a signal responsive to the pattern;
- and
- a processor, coupled to receive and analyze the signal so as to measure a dimension of the feature in a direction parallel to the surface.
1 more element
Dependencies are inferred from the claim text.