Method to construct variable-area capacitive transducers
OwnerRobert B. McIntosh, Philip E. Mauger +1inventors
InventorsRobert B. McIntosh, Philip E. Mauger, Steven R. Patterson
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Abstract
A method to construct a capacitive transducers comprising the steps of forming over and in a planar surface of a substrate at least one rigid electrode of a variable-area capacitor electrically connected to a location on said substrate reserved for electrode attachment; providing a cooperating flexible electrode with a dielectric layer; and bonding said flexible electrode to said substrate in a surface region surrounding said rigid electrode.
Claims20
A method to construct a capacitive transducer comprising the steps of:
- providing a substrate with a planar surface;
- forming over and in said planar surface at least one rigid electrode of a variable-area capacitor that is electrically connected to a region on said substrate reserved for electrode attachment;
- and providing and bonding a cooperating flexible electrode with a dielectric layer to said planar surface in a region surrounding said rigid electrode.
A method to construct a capacitive transducer comprising the steps of:
- providing a substrate with a planar surface;
- forming over and in said planar surface at least one rigid electrode of a variable-area capacitor;
- depositing a dielectric layer over said rigid electrode;
- and providing and bonding a cooperating flexible electrode to said planar surface in a region surrounding said rigid electrode.
Dependencies are inferred from the claim text.