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US 6,556,415 B1Granted
Tunable/variable passive microelectronic components
AssigneeIndustrial Technologies Research Institute
InventorsCheng-Hong Lee, Hsin-Li Lee
Life of this patent
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Abstract
A tunable microelectronic capacitor and a tunable microelectronic inductor, each utilizing a micro-actuator fabricated by MEMS technique as a major component in the capacitor, the micro-actuator drives a dielectric plate in between to electrode plates to vary the capacitance. In the inductor, the micro-actuator drives a cantilever beam member made of a magnetic material into an inductor coil for changing the inductance of the coil.
Claims8
A tunable microelectronic capacitor comprising:
- a pre-processed semiconductor substrate;
- a micro-actuator constructed of two opposing sections supported on said pre-processed semiconductor substrate, one of said two opposing sections having attached thereon a horizontal plate member formed of a dielectric material extending outwardly away from said micro-actuator;
- and
- a pair of electrode plates supported on said pre-processed semiconductor substrate and are parallelly positioned spaced-apart from each other for receiving said horizontal plate member formed of said dielectric material there-in-between.
1 more element
Dependencies are inferred from the claim text.