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US 6,556,414 B2Granted
Electrostatic and vacuum chucking holding apparatus
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorMamoru Kosakai
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AssigneeSumitomo Osaka Cement Co., Ltd.
InventorMamoru Kosakai
Estimating the term…
This invention provides an attraction holding apparatus for holding a plate-shaped specimen to improve the uniformity of surface temperatures in microscopic regions of the specimen while exhibiting sufficient holding strength and detachability after the impressed voltage is removed (in the case of electrostatic chucking), without causing degradation in the chemical and mechanical properties at the surfaces contacting the specimen, such as the upper surfaces of the protrusions, and without having to introduce excessive amount of gas. This attraction holding apparatus is constituted by a flat base and a plurality of protrusions erected in the attachment region in the flat base, so that the plate-shaped specimen is held on the protrusions. Each upper surf ace of the protrusions is constituted by a specimen holding surface and a concavity. According to this invention, uniformity of surface temperatures in the microscopic regions of the specimen is improved, without causing degradation in the chemical and mechanical properties of the protrusion formed inside the attachment region and without introducing excessive amount of gas.
A holding apparatus having a flat base, and a plurality of protrusions erected in an attachment region in the flat base, for attraction fixation of a plate-shaped specimen on the plurality of protrusions, wherein each upper surface of the protrusions is comprised by a specimen holding surface and a concavity.
A holding apparatus having a flat base, and a plurality of protrusions erected in an attachment region in the flat base, for attraction fixation of a plate-shaped specimen on the plurality of protrusions, wherein each upper surface of the protrusion is comprised by a planar region having a center line average roughness of not more than 0.5 μm and a rough region having a centerline average roughness of not less than 0.5 μm.
A holding apparatus having a flat base, and a plurality of protrusions erected in an attachment region in the flat base, for attraction fixation of a plate-shaped specimen on the plurality of protrusions, wherein each upper surface of the protrusions comprises a specimen holding surface and a concavity, wherein the concavity is formed in a location surrounded by the specimen holding surface, wherein a width of the specimen holding surface is not more than twice a thickness of a plate-shaped specimen to be clamped.
A holding apparatus having a flat base, and a plurality of protrusions erected in an attachment region in the flat base, for attraction fixation of a plate-shaped specimen on the plurality of protrusions, wherein each upper surface of the protrusions comprises a specimen holding surface and a concavity, wherein an area ratio of a total area of the specimen holding surfaces to a total area of the upper surfaces of the protrusions is in a range of 10-90%.
A holding apparatus having a flat base, and a plurality of protrusions erected in an attachment region in the flat base, for attraction fixation of a plate-shaped specimen on the plurality of protrusions, wherein each upper surface of the protrusions comprises a specimen holding surface and a concavity, wherein an area ratio of a total area of the specimen holding surfaces to a total area of the attachment regions is in a range of 0.5-30%.
A holding apparatus having a flat base, and a plurality of protrusions erected in an attachment region in the flat base, for attraction fixation of a plate-shaped specimen on the plurality of protrusions, wherein each upper surface of the protrusions comprises a specimen holding surface and a concavity, wherein a fabrication depth of the concavity is in a range of 0.1-2.0 μm.
Dependencies are inferred from the claim text.