Silicon sliders with trapezoidal shape and drie process for fabrication
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsRichard Bunch, Linden J. Crawforth, Anthony A. Razouk, Timothy C. Reiley
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Abstract
A trapezoidal shaped silicon slider is described in the present invention. The slider has a first parallel surface larger than a second parallel surface, thereby generating a built-in positive pitch with respect to a recording medium when the slider is incorporated into a hard disk drive. The slider further includes round edges at the first parallel surface, longitudinal holes within its body, non-planar slanted side surfaces, and a rounded leading edge. The silicon, trapezoidal slider is fabricated using a deep reactive ion etching (DRIE) technique.
Claims16
A magnetic recording head slider made of silicon and shaped as a hexahedron, the slider having:
- (a) a height h corresponding to distance between first and second generally rectangular parallel surfaces, the first parallel surface being the trailing end of the slider and the second parallel surface being the leading end of the slider;
- (b) a thickness t1 at the first parallel surface and a thickness t2 at the second parallel surface, wherein t1 is greater than t2 such that the slider has a greater thickness at its trailing end than at its leading end, thereby enabling a built-in positive pitch;
- and
- (c) a width w1 at the first parallel surface and a width w2 at the second parallel surface, wherein w1 is greater than w2;
- wherein each of the remaining four surfaces is generally trapezoidal, two of the four trapezoidal surfaces being non-parallel slanted side surfaces defined by w1, w2 and h.
Dependencies are inferred from the claim text.