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US 6,556,338 B2Granted
MEMS based variable optical attenuator (MBVOA)
AssigneeINTPAX, Inc.
InventorsNaiqian Han, Liji Huang
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Abstract
The present invention discloses an optimized optical attenuator device. It includes the design of resonator formed by two identical mirrors, which are made by MEMS process. The structure realizes the minimum insertion loss. The two membranes are chosen to be with high reflection rate. Multiple layer or metal layer or mixture of them can produce membrane of high reflection rate. High reflection rate causes low tuning voltage for one certain attenuation range.
Claims19
A micro-electro-mechanical system (MEMS) device supports on a substrate comprising:
- an electrically tunable membrane having an optically transparent portion for transmitting an optical signal through an optical path therethrough wherein said membrane having a reflection rate of at least 50%;
- and
- a plurality of optical path interfaces for said optical signal to transmit from a first material medium to a second material medium of different refraction indexes and an antireflection (AR) layer is disposed on each of said interfaces between said first material medium and second material medium;
- and
- transmission spectrum is employed to fabricate the MEMS device.
2 more elements
A micro-electro-mechanical system (MEMS) device supports on a substrate comprising:
- a first and a second multi-layer membranes formed as two high reflection-rate membranes functioning as two mirrors of a resonator;
- and
- transmission spectrum is employed to fabricate the MEMS device.
Dependencies are inferred from the claim text.