Optical mirror and optical scanner and laser machining apparatus using the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsHidehiko Karasaki, Kimiko Kawazoe
Life of this patent
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AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsHidehiko Karasaki, Kimiko Kawazoe
Estimating the term…
A reliable galvano-mirror employed for laser machining is disclosed. The mirror is far reduced its weight for getting a higher rotation. On the rear surface of the mirror, a lightweight rib-structure, which is formed from a mirror support beam centered across the surface and some ribs extending from the beam, holds the mirror. Against a distortion occurred in rotating at high speed, the mirror is provided with a high rigidity. And the mirror is structured integrally with the motor shaft holder. Besides, a slit is formed between the rib disposed close to the holder and the support beam centered across the rear surface of the mirror. Providing slit enables to minimize a local distortion caused by a stress from fastening screws to attach the mirror to the motor shaft.
A rotatable optical mirror attachable to a motor shaft, said rotatable optical mirror comprising:
An optical scanner having a motor with a motor shaft and an optical mirror, said optical mirror comprising:
A laser machining apparatus equipped with a laser oscillator and an optical scanner arranged on an optical path of a laser beam from the laser oscillator, said optical scanner comprising:
Dependencies are inferred from the claim text.