Pulsed source scanning interferometer
AssigneeVeeco Instruments Inc.
InventorsDavid J. Aziz, Robert E. Knowlden, Matthew P. Abbene
Life of this patent
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Abstract
A pulsed light source in used conjunction with a ramping scanning mechanism for phase-shift and vertical-scanning interferometry. The pulse length and the scanning velocity are selected such that a minimal change in OPD occurs during the pulse. As long as the duration of the pulse is shorter than the detector's integration time, the effective integration time and the corresponding phase shift are determined by the length of the pulse, rather than the detector's characteristics. The resulting minimal phase shift produces negligible loss of fringe modulation, thereby greatly improving signal utilization during phase-shifting and vertical-scanning interferometry.
Claims14
A method of reducing loss of fringe modulation during interferometric measurements of a test surface of an object, comprising the following steps:
- (a) emitting a pulsed light wavefront;
- (b) spitting the pulsed light wavefront into a test beam directed to the test surface and a reference beam directed to a reference surface;
- (a) producing multiple optical path differences between the reference beam and the test beam;
- (d) detecting a combination of wavefronts reflected from the reference surface and the test surface on a light-intensity sensor having a predetermined integration time;
- and
- (e) synchronizing the emission of said pulsed light wavefront of step (a) with the integration time of the sensor;
- wherein said pulsed light wavefront is emitted using a pulse length corresponding to a maximum phase shift of about π/2 radians during said integration time of the light-intensity sensor;
- and
- wherein the pulsed light wavefront is characterized by a constant amplitude.
A method of reducing loss of fringe modulation during interferometric measurements of a test surface of an object, comprising the following steps:
- (a) emitting a light wavefront;
- (b) splitting the light wavefront into a test beam directed to the test surface and a reference beam directed to a reference surface;
- (c) producing multiple optical path differences between the reference beam and the test beam;
- and
- (d) detecting a combination of wavefronts reflected from the reference surface and the test surface on a light-intensity sensor having a predetermined periodic integration time;
- wherein said integration time corresponds to a maximum phase shift of the light wavefront of about π/2 radians;
- and
- wherein the light wavefront is characterized by a constant amplitude.
Dependencies are inferred from the claim text.