Back to results
US 6,556,304 B1Granted
Method of supporting reference plate for lightwave interferometer
AssigneeFuji Photo Optical Co., Ltd.
InventorHiroshi Shibamoto
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeFuji Photo Optical Co., Ltd.
InventorHiroshi Shibamoto
Estimating the term…
An O ring 41 having an inside diameter slightly smaller than the diameter of a reference plate 1 is wound about the reference plate 1 at an outer peripheral face position aligning with a neutral plane 42 of the reference plate 1, and the O ring 41 and the outer peripheral face 4 of the reference plate 1 are uniformly bonded and secured together with an adhesive 32. Subsequently, the reference plate 1 wound with the O ring 41 is inserted into an attachment 5 to be mounted to the main body of an interferometer, by way of an opening of the attachment 5. After it is confirmed that the O ring 41 is stably in contact with the abutment of the attachment 5, and that reference plate 1 is not directly in contact with the attachment 5, a pressure ring 12 is caused to press and secure the O ring 41. Thus, the reference plate 1 is prevented from deforming when being attached to the main body of the interferometer, and from rotating with respect to the optical axis thereafter, whereby interference fringes can be measured with a high accuracy and favorable reproducibility.
A method of supporting a reference plate for a lightwave interferometer which divides a luminous flux from a light source into two, employs one of the resulting two luminous fluxes as an object lightwave irradiating a sample to be inspected and thereby carrying the state of phase of said sample, employs the other as a reference lightwave irradiating said reference plate and thereby carrying the state of phase of said reference plate, and recombines the two lightwaves together, so as to obtain interference fringes corresponding to the phase difference between said lightwaves;
A method of supporting a reference plate for a lightwave interferometer which divides a luminous flux from a light source into two, employs one of the resulting two luminous fluxes as an object lightwave irradiating a sample to be inspected and thereby carrying the state of phase of said sample, employs the other as a reference lightwave irradiating said reference plate and thereby carrying the state of phase of said reference plate, and recombines the two lightwaves together, so as to obtain interference fringes corresponding to the phase difference between said lightwaves;
A method of supporting a reference plate for a lightwave interferometer which divides a luminous flux from a light source into two, employs one of the resulting two luminous fluxes as an object lightwave irradiating a sample to be inspected and thereby carrying the state of phase of said sample, employs the other as a reference lightwave irradiating said reference plate and thereby carrying the state of phase of said reference plate, and recombines the two lightwaves together, so as to obtain interference fringes corresponding to the phase difference between said lightwaves;
Dependencies are inferred from the claim text.