Liquid crystal display device
AssigneeSony Corporation
InventorMasumitsu Ino
Life of this patent
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Abstract
A liquid crystal display device of the monolithic type which comprises a first substrate, a plurality of display elements arranged in a matrix on the first substrate to define a display area of the liquid crystal display device, each of the display elements comprising a picture element or pixel electrode and a switching or pixel transistor associated with the picture element or pixel electrode, a driving circuit formed on the first substrate and connected to the display area. The driving circuit includes a horizontal driver and a vertical driver. The device further includes a second substrate substantially entirely opposed to the first substrate, and a liquid crystal layer disposed between the first and second substrates. A passivation layer is provided to cover the display area or pixel transistors and driving circuit.
Claims9
A process of forming an active matrix substrate comprising:
- forming thin film transistors on a substrate, the thin film transistors having polysilicon thin film regions;
- forming first metal wiring on the substrate coupled to the thin film transistors;
- subsequently forming a first passivation layer over the thin film transistors;
- forming a second passivation layer on the first passivation layer;
- annealing with hydrogen to hydrogenate the polysilicon thin film regions of the thin film transistors;
- removing the second passivation layer;
- and
- forming a polymide film over the first passivation layer.
Dependencies are inferred from the claim text.