Phased array antenna and its manufacturing method

A phased array antenna having a multilayered structure, comprising:

• plural radiation elements on one layer of the multilayered structure;
• plural phase controllers on a further layer of the multilayered structure for controlling phases of RF signals transmitted from said plural radiation elements by application of respective phase shift amounts,
• each of said plural phase controllers comprising connective wiring on said further layer and a phase control circuit that sets the respective phase shift amount and that is carried by a substrate mounted on said further layer, said connective wiring being operatively connected to said phase control circuit;
• plural signal lines for providing respective phase shift amount signals to said plural phase controllers;
• and
• plural scanning lines for providing respective timing signals that set a of time of application of the respective phase shift amounts by said plural phase controllers,
• said plural scanning lines and said plural signal lines being arranged transversely to each other in a matrix on said further layer, said plural phase controllers being connected to respective ones of said plural scanning lines and said plural signal lines adjacent to intersections thereof.