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US 6,556,031 B2Granted
Verticle probe card for attachment within a central corridor of a magnetic field generator
AssigneeVeeco Instruments Inc.
InventorsJames M. Forbis, Dennis J. Cahalan
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Abstract
A vertical probe card assembly containing a plurality of vertical probe cards is mounted within a central corridor or opening within a magnetic field generator. Each of the vertical probe cards has a multiplicity of probe needles extending downwardly therefrom for electrically contacting test pads of a device under test that is positioned below the magnetic field generator.
Claims2
A probe card comprising:
- an elongated probe card substrate having opposed ends;
- a multiplicity of probe needles coupled to one of said opposed ends, said probe needles extending substantially parallel to a horizontal surface of a device under test;
- and
- wherein said probe card substrate is disposed so as to extend through a corridor in a magnetic field generator such that said probe card substrate is substantially orthogonal to the horizontal surface of the device under test.
1 more element
Dependencies are inferred from the claim text.