Light emitting device and a method of manufacturing the same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Masaaki Hiroki, Takeshi Fukunaga
Life of this patent
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Abstract
To provide a light emitting device having a highly definite pixel portion. An anode (102) and a bank (104) orthogonal to the anode (102) are formed on an insulator (101). A portion of the bank (104) (controlling bank 104b) is made of a metal film. By applying a voltage thereto, an electric field is formed, and a track of an EL material that is charged with an electric charge can be controlled. Thus, it becomes possible to control a film deposition position of an EL layer with precision by utilizing the above method.
Claims36
A method of manufacturing a light-emitting device comprising:
- forming a plurality of thin film transistors over a substrate;
- forming a plurality of pixel electrodes electrically connected to the plurality of thin film transistors;
- forming a plurality of banks comprising a lamination of an insulating film and a metal film so as to surround the plurality of pixel electrodes;
- forming a first luminous material over first pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the first pixel electrodes with a charge having an opposite polarity to the polarity;
- forming a second luminous material over second pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the second pixel electrodes with a charge having an opposite polarity to the polarity;
- and
- forming a third luminous material over third pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the third pixel electrodes with a charge having an opposite polarity to the polarity,
- wherein the steps of forming the first through third luminous materials are conducted by an evaporation method.
A method of manufacturing a light-emitting device comprising:
- forming a plurality of thin film transistors over a substrate;
- forming a plurality of pixel electrodes electrically connected to the plurality of thin film transistors;
- forming a plurality of banks comprising a lamination of an insulating film and a metal film so as to surround the plurality of pixel electrodes;
- forming a first luminous material over first pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the first pixel electrodes with a charge having an opposite polarity to the polarity;
- forming a second luminous material over second pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the second pixel electrodes with a charge having an opposite polarity to the polarity;
- and
- forming a third luminous material over third pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the third pixel electrodes with a charge having an opposite polarity to the polarity,
- wherein the steps of forming the first through third luminous materials are conducted by an ink jet method.
A method of manufacturing a light-emitting device comprising:
- forming a plurality of thin film transistors over a substrate;
- forming a plurality of pixel electrodes electrically connected to the plurality of thin film transistors;
- forming a plurality of banks comprising a lamination of an insulating film and a metal film so as to surround the plurality of pixel electrodes;
- forming a first luminous material over first pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the first pixel electrodes with a charge having an opposite polarity to the polarity;
- forming a second luminous material over second pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the second pixel electrodes with a charge having an opposite polarity to the polarity;
- and
- forming a third luminous material over third pixel electrodes while charging the plurality of banks with a charge having a polarity and charging the third pixel electrodes with a charge having an opposite polarity to the polarity,
- wherein the steps of forming the first through third luminous materials are conducted by an ion plating method.
A method of manufacturing a light-emitting device comprising:
- forming a plurality of thin film transistors over a substrate;
- forming a plurality of pixel electrodes electrically connected to the plurality of thin film transistors;
- forming a plurality of banks comprising a lamination of an insulating film and a metal film so as to surround the plurality of pixel electrodes;
- forming a first luminous material charged with a polarity over first pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the first pixel electrodes with a charge having an opposite polarity to the polarity;
- forming a second luminous material charged with a polarity over second pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the second pixel electrodes with a charge having an opposite polarity to the polarity;
- and
- forming a third luminous material charged with a polarity over third pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the third pixel electrodes with a charge having an opposite polarity to the polarity,
- wherein the steps of forming the first through third luminous materials are conducted by an evaporation method.
A method of manufacturing a light-emitting device comprising:
- forming a plurality of thin film transistors over a substrate;
- forming a plurality of pixel electrodes electrically connected to the plurality of thin film transistors;
- forming a plurality of banks comprising a lamination of an insulating film and a metal film so as to surround the plurality of pixel electrodes;
- forming a first luminous material charged with a polarity over first pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the first pixel electrodes with a charge having an opposite polarity to the polarity;
- forming a second luminous material charged with a polarity over second pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the second pixel electrodes with a charge having an opposite polarity to the polarity;
- and
- forming a third luminous material charged with a polarity over third pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the third pixel electrodes with a charge having an opposite polarity to the polarity,
- wherein the steps of forming the first through third luminous materials are conducted by an ink jet method.
A method of manufacturing a light-emitting device comprising:
- forming a plurality of thin film transistors over a substrate;
- forming a plurality of pixel electrodes electrically connected to the plurality of thin film transistors;
- forming a plurality of banks comprising a lamination of an insulating film and a metal film so as to surround the plurality of pixel electrodes;
- forming a first luminous material charged with a polarity over first pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the first pixel electrodes with a charge having an opposite polarity to the polarity;
- forming a second luminous material charged with a polarity over second pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the second pixel electrodes with a charge having an opposite polarity to the polarity;
- and
- forming a third luminous material charged with a polarity over third pixel electrodes while charging the plurality of banks with a charge having the polarity and charging the third pixel electrodes with a charge having an opposite polarity to the polarity,
- wherein the steps of forming the first through third luminous materials are conducted by an ion plating method.
Dependencies are inferred from the claim text.