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US 6,555,888 B2Granted
Electrostatic discharge protection for sensors
AssigneeSTMicroelectronics S.r.l.
InventorsArnaud Yves Lepert, Danielle A. Thomas
Life of this patent
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Abstract
A structure and method is disclosed for dissipating electrostatic charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry, and a conductive layer and passivation layers disposed over the underlying dielectric layer wherein the conductive layer diffuses electrostatic charges at the surface of the integrated circuit.
Claims20
A portion of an integrated circuit, comprising:
- a plurality of conductive plates which form capacitors with an object placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object;
- and
- a composite protection layer that isolates the conductive plates and protects the conductive plates from damage, wherein the composite protection layer comprises:
- an insulating layer between and over the plurality of conductive plates;
- and
- a conductive electrostatic discharge region overlying at least a portion of dielectric region,
- wherein at least a portion of the protective layer includes an opening therethrough over at least one of the conductive plates.
4 more elements
A portion of an integrated circuit, comprising:
- a dielectric layer over a plurality of conductive plates which form capacitors with an object placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object, the dielectric layer isolating the conductive plates;
- and
- a conductive layer disposed over at least a portion of the dielectric layer and disposed over or adjacent to one or more conductive plates, wherein the conductive layer dissipates an electrostatic charge in a manner that prevents the electrostatic charge from reaching the plurality of conductive plates and wherein the conductive layer includes an opening therethrough over at least one of the conductive plates.
A device, comprising:
- a plurality of conductive plates, each pair of conductive plates forming a capacitor with an object when the object is placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object,
- a dielectric layer over the conductive plates, the dielectric layer isolating the conductive plates;
- a passivation layer over the dielectric layer, the passivation layer having openings therethrough over the conductive plates;
- and
- electrostatic discharge regions over the conductive plates at least within the openings through the passivation layer.
2 more elements
Dependencies are inferred from the claim text.