Semiconductor device with minimal short-channel effects and low bit-line resistance
AssigneeMacronix International Co., Ltd.
InventorsHung-Sui Lin, Han Chao Lai, Tao Cheng Lu
Life of this patent
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Abstract
A transistor device that includes at least two transistors, each transistor including a source region, a drain region, and a shallow trench isolation formed between and contiguous with the source and drain regions, wherein the shallow trench isolation electrically isolates the source and drain regions to minimize the short-channel effects, a conductor layer disposed over the source region, shallow trench isolation, and drain region, wherein the conductor layer electrically connects the source and drain regions to serve as a channel region, a gate oxide disposed over the conductor layer, and a gate structure formed over the gate oxide.
Claims19
A semiconductor device, comprising:
- a substrate having a source region, a drain region, and a shallow trench isolation formed between and contiguous with the source and drain regions, wherein the shallow trench isolation electrically isolates the source and drain regions;
- a conductor layer disposed over the substrate, wherein the conductor layer overlaps the source region, shallow trench isolation, and drain region;
- a gate oxide disposed over the conductor layer;
- and
- a gate structure formed over the gate oxide, wherein the gate structure, source region and drain region form a transistor.
A semiconductor device, comprising:
- at least two transistors, each transistor including
- a source region,
- a drain region, and
- a shallow trench isolation formed between and contiguous with the source and drain regions, wherein the shallow trench isolation electrically isolates the source and drain regions;
- a conductor layer disposed over the source region, shallow trench isolation, and drain region, wherein the conductor layer electrically connects the source and drain regions to serve as a channel region;
- a gate oxide disposed over the conductor layer;
- and
- a gate structure formed over the gate oxide, wherein the source region, drain region, and the gate structure form a transistor.
A semiconductor device, comprising:
- a first transistor including
- a first diffused region,
- a second diff used region formed spaced apart from the first diffused region,
- a first shallow trench isolation disposed between and contiguous with the first and second diffused regions, wherein the first shallow trench isolation electrically isolates the first and second diffused regions,
- a first conductor layer formed over the first diffused region, the first shallow trench isolation, and the second diffused region,
- a first gate oxide disposed over the first conductor layer, and
- a first gate structure formed over the first gate oxide;
- and a second transistor formed adjacent the first transistor, including
- a third diffused region formed spaced apart from the first diffused region,
- a fourth diffused region formed spaced apart from the third diffused region,
- a second shallow trench isolation disposed between and contiguous with the third and fourth diffused regions, and formed spaced apart from the first shallow trench isolation, wherein the second shallow trench isolation electrically isolates the third and fourth diffused regions,
- a second conductor layer formed spaced apart from the first conductor layer, and over the third diffused region, the second shallow trench isolation, and the fourth diffused region,
- a second gate oxide disposed over the second conductor layer, and
- a second gate structure formed over the second gate oxide.
Dependencies are inferred from the claim text.