Method and apparatus for inspecting bumps and determining height from a regular reflection region

An apparatus for inspecting a bump provided on a surface of an object to be inspected, comprising:

• a first optical device including a first beam emitting part irradiating a first irradiation beam on said object in an oblique direction, an imaging part via which said first irradiation beam is imaged on said object, a first selective filter transmitting a first reflected beam from said object, a position sensitive detector outputting an electric current corresponding to the brightness and position of said first reflected beam, and a first signal processing part outputting data representing first regular reflection region data in a first reflection image and data representing the height of the bump based on said electric current;
• and
• a control device connected to a main-scanning operation controlling part, a sub-scanning operation controlling part and a first memory in which the first reflection image and the bump height data are stored, said control device calculating a shifted position of said first regular reflection region on the basis of said height data and said predetermined angle and determining whether said calculated shifted position of said first regular reflection region is within a region in said first reflection image to detect a height of the bump, said determining comprising:
• positioning the first reflection image with predetermined data;
• and
• setting a central position of the region according to the position information of the bump in the predetermined data.

A method of inspecting bumps provided on a surface of an object to be inspected, said method comprising the steps of:

• a) irradiating a first irradiation beam on said object in an oblique direction at a predetermined angle with respect to said surface;
• b) imaging a first reflected beam from said object to obtain a first reflection image including a reflection region, said reflection region being produced by a part of the first reflected beam from the bump;
• c) obtaining height data of said bump that corresponds to said first regular reflection region;
• d) calculating a shifted position of said first regular reflection region on the basis of said height data and said predetermined angle;
• e) masking said first reflection image after said step d);
• and
• f) determining whether said calculated shifted position of said first regular reflection region is within a predetermined region in said first reflection image.

A method of inspecting bumps provided on a surface of an object to be inspected, said method comprising the steps of:

• a) irradiating a first irradiation beam on said object in an oblique direction at a predetermined angle with respect to said surface;
• b) imaging a first reflected beam from said object to obtain a first reflection image including a first regular reflection region, said first regular reflection region being produced by a part of the first reflected beam reflected near an apex of the bump;
• c) obtaining height of said bump that corresponds to said first regular reflection region;
• d) calculating a shifted position of said height data corresponding to said first regular reflection region on the basis of said height data and said predetermined angle;
• and
• e) determining whether said calculated shifted position of said first regular reflection region is within a predetermined region in said first reflection image.

An apparatus for inspecting bumps provided on a surface of an object to be inspected, said apparatus comprising:

• a first part for irradiating a first irradiation beam on said object in an oblique direction at a predetermined angle with respect to said surface;
• a second part for imaging a first reflected beam from said object to obtain a first reflection image including a first regular reflection region, said first regular reflection region being produced by a part of the first reflected beam reflected near an apex of the bump;
• a third part for obtaining height data of said bump that corresponds to said first regular reflection region;
• a fourth part for calculating a shifted position of said first regular reflection region on the basis of said height data and said predetermined angle;
• and
• a fifth part for determining whether said calculated shifted position of said first regular reflection region is within a region in said first reflection image to detect a height of the bump, said determining comprising:
• positioning the first reflection image with a predetermined data;
• and
• setting a central position of the region according to the position information of the bump in the predetermined data.

A method of inspecting bumps provided on a surface of an object to be inspected, said method comprising the steps of:

• a) irradiating a first irradiation beam on said object in an oblique direction at a predetermined angle with respect to said surface;
• b) imaging a first reflected beam from said object to obtain a first reflection image including a first regular reflection region, said first regular region being produced by a part of the first reflected beam reflected near an apex of the bump;
• c) obtaining height data of said bump that corresponds to said first regular reflection region;
• d) calculating a shifted position of said first regular reflection region on the basis of said height data and said predetermined angle;
• and
• e) determining whether said calculated shifted position of said first regular reflection region is within a predetermined region in said first reflection image to detect a height of the bump, wherein said predetermined region has a shape corresponding to a shape of the bump.

A method of inspecting bumps provided on a surface of an object to be inspected, said method comprising the steps of:

• a) irradiating a first irradiation beam on said object in an oblique direction at a predetermined angle with respect to said surface;
• b) imaging a first reflected beam from said object to obtain a first reflection image including a first regular reflection region, said first regular reflection region being produced by a part of the first reflected beam reflected near an apex of the bump;
• c) obtaining height data of said bump that corresponds to said first regular reflection region;
• d) calculating a shifted position of said first regular reflection region on the basis of said height data and said predetermined angle;
• e) determining whether said calculated shifted position of said first regular reflection region is within a predetermined region in said first reflection image;
• f) irradiating a second irradiation beam from a position above said surface of said object;
• g) imaging a second reflected beam from said object and obtaining a second reflection image;
• and
• h) determining said predetermined position based on a second regular reflection region in said second reflection image, said second regular reflection region being produced by a part of the second reflected beam reflected at the bump.