Method and device for focusing a charged particle beam
AssigneeApplied Materials, Inc.
InventorsHans-Peter Feuerbaum, Dieter Winkler
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Abstract
The invention provides an objective lens 1 for focusing a charged particle beam 30 on a specimen. The objective lens comprises a first focusing lens 2 positioned between a charged particle source and the specimen for finely focusing the beam of charged particles on the specimen. The objective lens further comprises a second focusing electrostatic lens 20 positioned between the first focusing lens and the specimen for coarsely focusing the beam of charged particles on the specimen.
Claims12
An objective lens for focusing a charged particle beam onto a specimen comprising:
- a first focusing lens positioned between a charged particle source and the specimen for finely focusing the beam of charged particles on the specimen;
- a second focusing lens positioned between the first focusing lens and the specimen for coarsely focusing the beam of charged particles on the specimen;
- and
- the second focusing lens being an electrostatic lens.
Method for focusing a charged particle beam onto a specimen comprising the following steps:
- finely focusing the charged particle beam with a first lens positioned between the charged particle source and the specimen;
- and
- coarsely focusing the charged particle beam with a second electrostatic lens interposed between the first lens and the specimen.
Dependencies are inferred from the claim text.