Scanning electron microscope
AssigneeHitachi, Ltd.
InventorsNaomasa Suzuki, Toshiro Kubo, Noriaki Arai, Mitsugu Sato, Hideo Todokoro, Yoichi Ose
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Abstract
Image observation at high resolution is realized and irregularity information of a sample is obtained. The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.
Claims22
A scanning electron microscope comprising an electron source for generating an electron beam, a focusing lens for focusing said electron beam, a magnetic field type object lens for finely limiting said focused electron beam and irradiating the same onto a sample, a deflector for two-dimensionally scanning said electron beam on said samples a detector arranged on an electron source side of said object lens so as to detect a signal emitted from said sample by irradiation of said electron beam, display means for displaying said signal detected by said detector as a sample image, deceleration electric field generation means for generating an electric field for decelerating said electron beam to be irradiated onto said sample, and voltage control means for controlling a voltage applied to said deceleration electric field generation means, wherein said voltage control means controls said voltage to be applied to said deceleration electric field generation means so that reflected electrons emitted in a direction at a small angle with said sample surface among said signal generated from said sample are detected by said detector, and a sample image having effects of light and shade in correspondence with irregularity of said sample surface can be obtained.
A scanning electron microscope comprising an electron source for generating an electron beam, a focusing lens for focusing said electron beam, a magnetic field type object lens for finely limiting said focused electron beam and irradiating the same onto a sample, a deflector for two-dimensionally scanning said electron beam on said sample, a detector arranged on an electron source side of said object lens so as to detect a signal emitted from said sample by irradiation of said electron beam, display means for displaying said signal detected by said detector as a sample image, acceleration electric field generation means for generating an electric field for accelerating said signal generated from said sample, and voltage control means for controlling a voltage to be applied to said acceleration electric field generation means, wherein said voltage control means controls said voltage to be applied to said acceleration electric field generation means so that said reflected electrons emitted in a direction at a small angle with said sample surface among said signal generated from said sample are detected by said detector, and a sample image having effects of light and shade in correspondence with irregularity of said sample surface can be obtained.
A scanning electron microscope comprising:
- an electron source for generating an electron beam;
- a focusing lens for focusing said electron beam;
- a magnetic field type object lens for finely limiting said focused electron beam and irradiating said electron beam onto a sample;
- deceleration electric field forming means for forming a deceleration electric field for decelerating said electron beam between said object lens and said sample;
- said object lens being formed for leaking a magnetic field toward said sample,
- a plurality of detectors being arranged on a track of a reflected electron beam passing through an opening to pass the electron beam of said object lens as deflected on a track toward said object lens by said deceleration electric field forming means and as deflected on a track toward an optical axis of the electron beam,
- said plurality of detectors being arranged on the track of electron beam directed in different directions in a direction perpendicular to the optical axis of said electron beam.
A scanning electron microscope comprising:
- an electron source for generating an electron beam;
- a focusing lens for focusing said electron beam;
- a magnetic field type object lens for finely limiting said focused electron beam and irradiating the same onto a sample;
- deceleration electric field forming means for forming a deceleration electric field for decelerating said electron beam between said object lens and said sample;
- said object lens being formed for leaking a magnetic field toward said sample;
- and
- a detector arranged in a direction, to which a reflected electron beam emitted from said sample in directions other than that of the electron beam, passing an opening of said object lens as deflected on a track toward said object lens by said deceleration electric field forming means and as deflected on a track toward an optical axis of the electron beam.
Dependencies are inferred from the claim text.