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US 6,555,510 B2Granted
Bis(perfluoroalkanesulfonyl)imides and their salts as surfactants/additives for applications having extreme environments and methods therefor
Assignee3M Innovative Properties Company
InventorsWilliam M. Lamanna, Patricia M. Savu, Michael J. Parent, Lawrence A. Zazzera
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Abstract
The present invention provides for the use of bis(perfluoroalkanesulfonyl)imide and its salts as surfactants or additives applications having an extreme environment.
Claims7
A method of reducing the surface tension of a solution comprising:
- a) providing an aqueous solution where a hydrocarbon surfactant would degrade;
- wherein said aqueous solution is selected from the group consisting of:
- (i) ammonium fluoride and hydrogen fluoride solution;
- (iii) an acid copper plating solution comprising copper sulfate and sulfuric acid;
- (iv) a CMP slurry comprising abrasive particles selected from the group consisting of alumina, silica, and cerium;
- oxidant, etchant, and corrosion inhibitors;
- (v) a wafer cleaning solution comprising H2O2, O3, H2SO4, NH4OH, or HCl alone or in combination;
- (vi) ethylenediamine or ethanolamine solutions;
- and
- (vii) chromium trioxide, other chromium (VI) ions, and sulfuric acid;
- and
- b) adding to said solution a surface active agent comprising a bis(perfluoroalkanesulfonyl)imide or its salts.
9 more elements
Dependencies are inferred from the claim text.