Substrate with fluidic channel and method of manufacturing
AssigneeHewlett-Packard Development Company, L.P.
InventorsDonald J Milligan, Tim R Koch, Martha A Truninger, Diane W Lai, Timothy R Emery, J. Daniel Smith
Life of this patent
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Abstract
A method of manufacturing a fluidic channel through a substrate includes etching an exposed section on a first surface of the substrate, and coating the etched section of the substrate. The etching and the coating are alternatingly repeated until the fluidic channel is formed.
Claims66
A method of etching a fluid feed slot comprising:
- etching an exposed section on a first surface of a substrate;
- coating the etched section of the substrate;
- and
- alternatingly repeating the etching and the coating until the fluid feed slot through the substrate is formed.
A method of manufacturing a micro-fluidic channel in a substrate comprising:
- etching an exposed section on a first surface of the substrate;
- forming a temporary etch stop along the etched section of the substrate;
- and
- alternatingly repeating the etching and the forming until the micro-fluidic channel is formed through the substrate.
A method of manufacturing a fluid ejection device comprising:
- forming a fluid drop generator over a front side of a substrate;
- etching an exposed section of a back side, opposite the front side, of the substrate;
- coating the etched section of the substrate;
- and
- alternatingly repeating the etching and the coating until a slot in the substrate is formed through to the front side.
A method of manufacturing a micro-fluidic channel in a substrate comprising:
- dry etching an exposed section of a back side of a substrate to form a recess having inside surfaces;
- coating the inside surfaces of the recess;
- alternatingly repeating the etching and coating to form a trench from the back side of the substrate;
- and
- wet etching the trench until a slot is formed through to a front side of the substrate.
A method of manufacturing a fluid ejection device comprising:
- forming a fluid drop generator over a front side of a substrate;
- etching an exposed section of a back side, opposite the front side, of the substrate;
- coating the etched section of the substrate;
- alternatingly repeating the etching and the coating until a trench is formed in the back side of the substrate;
- and
- etching the front side of the substrate until a slot is formed through to the trench, and through the substrate.
A method of manufacturing a fluid ejection device comprising:
- forming a fluid drop generator over a front side of a substrate;
- etching an exposed section of the front side of the substrate;
- coating the etched section of the substrate;
- alternatingly repeating the etching and the coating until a trench is formed in the front side of the substrate;
- and
- etching the back side of the substrate in an area opposite the trench until a slot is formed through to the trench, and through the substrate.
A slotted substrate comprising:
- a first surface;
- a second surface opposite the first surface;
- and
- a slot from the second surface to the first surface;
- wherein the slot has side walls with projections, wherein the projections range up to about 3 microns.
A slotted substrate comprising:
- a first surface;
- a second surface opposite the first surface;
- and
- a slot from the second surface to the first surface;
- wherein a difference in width between the slot at the first surface, the slot at the second surface, and the slot in between the first and second surfaces is at most 6.5%.
A slotted substrate comprising:
- a first surface;
- a second surface opposite the first surface;
- and
- a slot from the second surface to the first surface, the slot having a first section adjacent the first surface, and a second section adjacent the second surface,
- wherein the first section has a first positively tapered profile,
- wherein the second section has a second positively tapered profile.
Dependencies are inferred from the claim text.