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US 6,555,294 B1Granted
Method for collective production of magnetic heads with rounded bearing surface
AssigneeCommissariat a l'Energie Atomique
InventorsJean-Baptiste Albertini, Pierre Gaud, Gérard Barrois, Henri Sibuet
Life of this patent
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Abstract
A process for collectively making integrated magnetic heads with a bearing surface obtained by photolithography. According to the process, on a wafer is deposited a plurality of heads, a mask defining the profile of the bearing surfaces and the wafer is collectively engraved in the vicinity of the pole pieces of the heads. Such a process may find particular application to the making of magnetic heads.
Claims14
A process for collectively making integrated magnetic heads, comprising:
- forming on a wafer a plurality of components each including magnetic pole pieces separated by an air-gap,
- collectively forming a rounded shape with at least one radius of curvature in the vicinity of the pole pieces of each component;
- and
- separating the components into discrete magnetic head devices having the rounded shape as a bearing surface,
- wherein the collectively forming step comprises at least one of masked photolithography and cutting by using a laser beam.
2 more elements
A process for collectively making integrated magnetic heads comprising:
- step for collectively forming a plurality of magnetic components on a wafer;
- step for collectively forming a rounded shape bearing surface for each of the magnetic components;
- and
- step for separating the plurality of magnetic components into discrete magnetic heads.
1 more element
Dependencies are inferred from the claim text.