Corrosion-resistant member, method of manufacturing the same and apparatus for heating corrosive substance
AssigneeNGK Insulators, Ltd.
InventorsMasao Nishioka, Naotaka Katoh, Shinji Kawasaki
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Abstract
This invention relates to a corrosion-resistant member comprising a ceramic substrate and a silicon carbide film formed through a chemical vapor deposition process and having a resistivity at room temperature of 20-500 Ω·cm, and a method of manufacturing the same as well as an heating apparatus using the same.
Claims8
A corrosion-resistant member comprising a silicon carbide ceramic substrate having a resistivity at room temperature of not less than 5000 Ω·cm, and a chemical vapor deposited film consisting of silicon carbide of a thickness of not less than 1 mm directly covering at least a surface of the substrate to be exposed to a corrosive substance and having a resistivity at room temperature of 20-500 Ω·cm.
Dependencies are inferred from the claim text.