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US 6,555,221 B1Granted
Method for forming an ultra microparticle-structure
AssigneeThe University of Tokyo
InventorsHiroshi Komiyama, Hiroaki Shirakawa, Toshio Osawa
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Abstract
A method for forming an ultra microparticle-structure composed of ultra microparticles including the steps of: forming on a substrate higher wettability parts and lower wettability parts to a material to be deposited, depositing on the substrate the material to be deposited to form particles made of the material on the substrate, and accumulating the particles in the higher wettability parts to form the ultra microparticle-structure composed of the ultra microparticles.
Claims20
A method for forming a nano-particle-structure composed of nano-particles comprising the steps of:
- forming on a substrate higher wettability parts and lower wettability parts to a material to be deposited;
- depositing said material on the substrate to form particles of said material thereon;
- and
- accumulating the particles in the higher wettability parts to form the nano-particle-structure composed of the nano-particles.
1 more element
Dependencies are inferred from the claim text.