Method of manufacturing information recording medium
AssigneeCanon Kabushiki Kaisha
InventorTsutomu Shiratori
Life of this patent
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Abstract
A recording film is formed on a surface of a substrate, including the slopes, which are positioned on both sides of each information track and have surfaces not parallel to the surfaces of the information tracks. The surface of the substrate is sputter-etched by accelerated ions impinging against the substrate surface in a substantially vertical direction. The recording film on each slope is etched away based on the dependence of a sputtering rate upon an incident angle of the ions, while the recording film remains on the surface of each information track.
Claims6
A method of manufacturing an information recording medium, comprising the steps of:
- forming a recording film on a surface of a substrate, including slopes, which are positioned on both sides of each information track and have surfaces not parallel to surfaces of said information tracks;
- and
- sputter-etching the surface of said substrate by accelerated ions impinging against the surfaces of said information tracks in a substantially vertical direction, thereby etching away the recording film on each said slope.
Dependencies are inferred from the claim text.