PVD coated cutting tool and method of its production
AssigneeSandvik AB
InventorsOlaf Zywitzki, Klaus Goedicke, Fred Fietzke, Siegfried Schiller, Torbjörn Selinder, Mats Ahlgren
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Abstract
The present invention describes a coating cutting tool for metal machining and a process for producing such tools. The coating is composed of one or more layers of refractory compounds of which at least one layer consists of nanocrystalline aluminum spinel of the type (Me)xAl2O3+x where Me is a second metal and 0<x≦1, deposited by Physical Vapor Deposition.
Claims21
A method of making a cutting tool comprising a body with at least on the functional parts of the surface thereof, a 0.5 to 20 μm thick hard and wear resistant coating, said process comprising depositing at least one refractory layer consisting of a nanocyrstalline Al-spinel compound of the type (Me)xAl2O3+x (0<x≦1), where Me is selected from the group consisting of Mg, Zn, Mn, Fe, Co, Ni, Cd, Cu, Cr and Sn and mixtures thereof, by reactive pulsed magnetron sputtering in a mixture of a rare and a reactive gas under the following conditions:
- the pulse frequency is set for 10 to 100 kHz,
- the deposition occurs with a rate of at least 1 nm/s with reference to a stationarily arranged substrate,
- the flux of the impinging particles onto each individual substrate is cyclically interrupted,
- the magnetron power density in time average is set for at least 10 W/cm2,
- the flow of the reactive gas is set for such a value that the impedance of the magnetron discharge lies between 150% and 250% of the impedance of a discharge burning between totally oxide-covered target electrodes, and
- the substrate temperature is set in the range 400° C. to 700° C. depending on the material of the tool body being coated.
Dependencies are inferred from the claim text.