Back to results
US 6,554,907 B2Granted
Susceptor with internal support
AssigneeApplied Materials, Inc.
InventorsEmanuel Beer, Robin Tiner
Life of this patent
Estimating the term…
Abstract
In a first embodiment, a susceptor is provided having a substrate supporting surface and an internal support frame that provides mechanical strength in a plane orthogonal to the substrate supporting surface, and provides flexibility in a plane parallel to the substrate supporting surface.
Claims24
A susceptor comprising:
- an exterior surface having a substrate supporting surface adapted to support a substrate, the exterior surface comprising a first material;
- and
- a support frame, encased within the first material, having a configuration that provides mechanical strength in a plane orthogonal to the substrate supporting surface, and flexibility in a plane parallel to the substrate supporting surface, the support frame comprising a second material.
A process for making a susceptor adapted to support a substrate, comprising:
- providing a support frame having a configuration that provides mechanical strength in a vertical plane, and flexibility in a horizontal plane;
- and
- encasing the support frame in an exterior material adapted to support a substrate;
- wherein the support frame comprises a material that has a higher mechanical strength at a processing temperature than the exterior material.
1 more element
A susceptor comprising:
- a substrate supporting surface adapted to support the substrate;
- and
- a support frame positioned below the substrate supporting surface, the support frame being encased within a first material and being formed of a second material that is different from the first material, the support frame having a configuration that provides mechanical strength in a plane orthogonal to the substrate supporting surface and flexibility in a plane parallel to the substrate supporting surface, the support frame being formed of one or more components that have a larger dimension in a plane orthogonal to the substrate supporting surface than in a plane parallel to the substrate supporting surface.
Dependencies are inferred from the claim text.