Method of making electron emitters

A method for fabricating an electron emitter, the method comprising the steps of:

• implanting ions into an electrically insulating substrate comprising a lattice structure so as to damage said lattice structure to form a conductive emitter having a sharp tip and a base within said substrate;
• providing electrical continuity between said tip, said base, and an external circuit;
• and
• depositing a continuous layer of a conductive material on said substrate so as to provide a gate structure.

A method for fabricating an electron emitter, the method comprising the steps of:

• implanting ions into a substrate comprising a lattice structure so as to damage said lattice structure of said substrate to form an implantation area and forming a conductive layer within said substrate;
• providing electrical continuity to said conductive layer;
• implanting ions into said substrate comprising a lattice structure including sp3 bonded carbon so as to damage said lattice structure and to change at least a portion of the sp3 bonded carbon in said lattice structure to a mixture of sp3 bonded carbon and sp2 bonded carbon, the damage to said lattice structure forming a tip at or near a surface of said lattice structure to form a conductive emitter having a sharp tip and base within said substrate;
• growing a thin protective layer on said substrate;
• providing at least one gate;
• and
• providing electrical continuity with said base.