Process and apparatus for blending and distributing a slurry solution
AssigneesL'Air Liquide - Societe Anonyme a'Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude, Air Liquide America Corporation
InventorsDavid L. Snyder, Karl J. Urquhart, Richard Swindell
Life of this patent
Estimating the term…
Abstract
On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.
Claims41
A process for blending and conveying a slurry solution to a point of use in a semiconductor processing facility, comprising:
- supplying at least a first and a second component to a mix tank sequentially, adding each said component until a coarse weight set point is reached and, upon attaining said coarse point, said component is allowed to settle and further added via pulsed injection until a fine weight set point is attained, thereafter blending the components into a slurry solution and conveying said slurry solution to a process tank and henceforth to the point of use.
A system for blending and conveying a slurry solution to a point of use in a semiconductor facility, comprising:
- a mix tank wherein at least a first and a second component are added sequentially, until each component reaches a coarse weight set point and said component is allowed to settle, there being at least one device for further adding said components via pulsed injection until a fine weight set point is attained;
- a stirrer for blending said at least first and second component into a slurry solution;
- a process tank for receiving said solution;
- and
- a conduit arranged for conveying said solution from said process tank and henceforth to the semiconductor facility point of use.
A process for blending and conveying a slurry solution to a point of use in a semiconductor processing facility, comprising the steps of:
- supplying a first portion of a first component to a mix tank until a coarse weight set point of the first component is achieved within the mix tank;
- supplying by pulse injection a second portion of the first component to the mix tank until a fine weight set point of the first component is achieved within the mix tank;
- supplying a first portion of a second component to the mix tank until a coarse weight set point of the second component is achieved within the mix tank;
- supplying by pulse injection a second portion of the second component to the mix tank until a fine weight set point of the second component is achieved in the mix tank;
- blending the supplied first and second components within the mix tank;
- and
- conveying the blended first and second components to a process tank and thereafter to the semiconductor processing facility point of use.
Dependencies are inferred from the claim text.