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AssigneeTokyo Electron Limited
InventorsKeizo Hirose, Kenji Sekiguchi, Tomohide Inoue, Takanori Miyazaki, Kinya Ueno
Estimating the term…
In a cleaning apparatus for substrates, such as semiconductor wafers, a permeable core member 68 made of a synthetic resin is supplied with distilled water from a distilled water supply path 60 within a head portion 66 of a cleaning tool 24. A planar portion 72 is provided on the lower surface of the core member 68 and a porous resin sheet 69 is attached to the outer surface of the core member 68, to cover it. The cleaning tool 24 is provided with an air bearing cylinder 30 that imparts a vertical driving force to a rod 31 that presses against the surface of a wafer W which is being rotated, and the distilled water supply path 60 is provided within the rod 31. The distilled water supplied from the distilled water supply path 60 permeates through the core member 68 and the porous resin sheet 69 and is sent out of the head 66 so that a flowing film of distilled water is formed on the surface of the wafer W. Thus contamination and damage of the substrate is prevented and the shape of the head is not destroyed.
A cleaning tool for cleaning a substrate, comprising:
A cleaning tool for cleaning a substrate, comprising:
A cleaning apparatus for cleaning a substrate, comprising:
Dependencies are inferred from the claim text.