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US 6,553,836 B2Granted
Surface acoustic wave (SAW) accelerometer
OwnerJohn T. Williamsinventor
Life of this patent
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Abstract
A monolithic low cost, high frequency surface acoustic wave (SAW) accelerometer is provided that is operable in high impact and vibration applications.
Claims20
A monolithic high frequency surface acoustic wave (SAW) accelerometer comprising:
- a substrate formed of a piezoelectric material, the substrate defining a frame;
- a beam formed integrally with the frame and suspended therefrom in cantilevered fashion, the beam defining a top and a bottom surface;
- and
- a resonator electrode pattern mounted on each of the top and bottom surfaces of the cantilevered beam, the resonator electrode patterns being electrically isolated one from the other.
1 more element
A monolithic high frequency surface acoustic wave (SAW) accelerometer comprising:
- a substrate formed of a piezoelectric material, the substrate defining a frame;
- a cantilevered beam integrally formed of the frame and suspended by one end therefrom, the cantilevered beam defining two substantially flat and parallel opposing surfaces;
- a first pattern of interconnected substantially parallel and spaced apart electrode lines formed normal to the longitudinal axis of the cantilevered beam on a first of the surfaces;
- and
- a second pattern of interconnected substantially parallel and spaced apart electrode lines formed normal to the longitudinal axis of the cantilevered beam on a second of the surfaces and electrically isolated from the first pattern of electrode lines.
2 more elements
A monolithic high frequency surface acoustic wave (SAW) accelerometer comprising:
- a frame formed in a substrate of piezoelectric material;
- an integral beam suspended by one end from an interior surface of the frame;
- substantially identical patterns of surface acoustic wave delay lines formed on opposing surfaces of the beam;
- and
- a digital processing circuit coupled to each of the patterns of surface acoustic wave delay lines.
2 more elements
A method for forming an accelerometer, the method comprising:
- forming a frame of a piezoelectric material;
- forming a cantilevered beam-shaped sensing member of the piezoelectric material integrally with the frame;
- depositing substantially identical patterns of surface acoustic wave delay lines on opposing surfaces of the beam;
- and
- connecting a circuit to each of the patterns of surface acoustic wave delay lines, the circuit adapted to apply a high frequency drive signal to each of the patterns of surface acoustic wave delay lines.
2 more elements
Dependencies are inferred from the claim text.