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US 6,553,829 B1Granted
Air flow sensor having grooved sensor element
AssigneesHitachi, Ltd., Hitachi Car Engineering Co., Ltd.
InventorsKeiichi Nakada, Izumi Watanabe, Masamichi Yamada
Life of this patent
Estimating the term…
Abstract
Grooves into which an adhesive agent is poured are formed on the adhesion face of a sensor element, the adhesion face being adhered to a surface of a sensor-supporting member, which in turn can make the depth of a layer of the adhesive agent between the sensor element and the sensor-supporting member zero, and remove the difference in level between both the top surfaces of the sensor element and the sensor-supporting member.
Claims16
An air flow sensor comprising:
- a sensor element with a heated resistor formed on a semiconductor substrate by way of an electrical insulation layer;
- a sensor-supporting member containing a cut-out space in which said sensor element is fixed;
- a first region in which said sensor element contacts said sensor-supporting member in said cut-out space;
- and
- a second region in which said sensor element is adhered to said sensor-Supporting member with an adhesive agent poured into a groove or grooves formed in said second region.
2 more elements
An air flow sensor comprising:
- a sensor element with a heated resistor formed on a semiconductor substrate by way of an electrical insulation layer;
- and
- a sensor-supporting member to which said sensor element is adhered with an adhesive agent;
- wherein at least one groove is formed on an adhesion surface of said sensor element, said adhesion surface being adhered to a surface of said sensor-supporting member.
1 more element
An air flow sensor comprising:
- a sensor element with a heated resistor formed on a semiconductor substrate by way of an electrical insulation layer;
- and
- a sensor-supporting member containing a cut-out space in which said sensor element is adhered to said sensor-supporting member with an adhesive agent poured into grooves formed in a region of the substrate;
- wherein a depression space extending along the peripheral edges of said sensor element is formed on at least one of an adhesion surface of said sensor element and an adhesion surface of said sensor-supporting member, an adhesive agent being poured into at least a part of said depression space.
1 more element
An air flow sensor comprising:
- a sensor element with a heated resistor formed on a semiconductor substrate by way of an electrical insulation layer;
- and
- a sensor-supporting member containing a cut-out space in which said sensor element is adhered to said sensor-supporting member with an adhesive agent poured into grooves formed in a region of the substrate;
- wherein a depression space extending along the peripheral edges of said sensor element is formed on at least one of an adhesion surface of said sensor element and an adhesion surface of said sensor-supporting member, an adhesive agent being poured into at least a part of said depression space, wherein said adhesive agent is continuously applied inside and outside of said peripheral edges of said sensor element.
1 more element
Dependencies are inferred from the claim text.