Method for manufacturing quartz glass crucible
AssigneeNanwa Quartz, Inc.
InventorsKazuhiro Akiho, Masaki Kusuhara, Hiroyuki Watanabe, Tomoyasu Uno
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AssigneeNanwa Quartz, Inc.
InventorsKazuhiro Akiho, Masaki Kusuhara, Hiroyuki Watanabe, Tomoyasu Uno
Estimating the term…
Present invention suppresses undesirable effects of the bubbles trapped in a silica glass crucible on single crystallization during the pulling process under a high-temperature load. When raw material powder is melted in a mold 1, graphite components of electrodes and impurities contained in the raw material are removed by introducing hydrogen gas and/or oxygen gas immediately after the start of arc discharge. Graphite and impurities are prevented from entering the product crucible, thereby suppressing the volume increase rate of the bubbles and reducing the inner pressure of the bubbles. Gases remaining in voids of an accumulated layer of silica powder formed inside the mold 1 can be replaced with helium gas, by supplying helium gas to the accumulated layer from the mold 1.
A method of producing a silica glass crucible, in which silica powder is melted by arc discharge between graphite electrodes and a silica glass crucible is formed in a rotating mold, comprising the steps of:
A method of producing a silica glass crucible, in which silica powder is melted by arc discharge between graphite electrodes and a silica glass crucible is formed in a rotating mold, comprising the steps of:
A method of producing a silica glass crucible, in which silica powder is melted by arc discharge and a silica glass crucible is formed in a rotating mold, comprising the steps of:
A method of producing a silica glass crucible, in which silica powder is melted by arc discharge and a silica glass crucible is formed in a rotating mold, comprising the steps of:
A method of producing a silica glass crucible, in which silica powder is melted by arc discharge and a silica glass crucible is formed in a rotating mold, comprising the steps of:
A method of producing a silica glass crucible, in which silica powder is melted by arc discharge and a silica glass crucible is formed in a rotating mold, comprising the steps of:
Dependencies are inferred from the claim text.