US 6,553,661 B2 · Semiconductor test structure having a laser defined current carrying structure

Abstract

A test structure that is readily and inexpensively configurable to interface with dies having different bond pad configurations is achieved by providing a blank test membrane having a conductive coating or a matrix of conductive lines formed thereon. Once a die bond pad configuration is known, the test membrane can be configured for the die bond pads by using a laser under software control to define connection pads correlating to the die bond pads and also to define interconnecting conductive traces from the connecting pads to contact pads that can be connected to test equipment. In one embodiment, the laser operates to ablate a continuous conductive coating, so as to form conductive pads and traces. In another embodiment, the laser is used to cut various lines in a matrix of conductive lines, so as to define conductive paths from the bond pads to the contact pads for connection to the test equipment.

Claims20

Dependent claims

A method of forming a test structure for interfacing to test equipment a semiconductor die having bond pads at predefined coordinates using a machine controlled laser, the test equipment having contact points at predefined locations, comprising:

forming a conductive material layer on a substrate;
defining first coordinates on the substrate corresponding to at least one predefined bond pad coordinate;
defining second coordinates on the substrate corresponding to at least one predefined test equipment contact point location;
defining third coordinates on the substrate corresponding to an interconnect between the predefined bond pad and the predefined test equipment contact point location;
ablating portions of the conductive material layer using a laser beam, while leaving unablated portions of the conductive material at the first, second and third coordinates.

2 more elements

Dependencies are inferred from the claim text.

Semiconductor test structure having a laser defined current carrying structure

Life of this patent

Semiconductor test structure having a laser defined current carrying structure

Life of this patent

Abstract

Claims20