Valve/sensor assemblies

A system comprising:

• a chamber having an opening;
• a valve/sensor assembly coupled to the chamber, the valve/sensor assembly comprising:
• a door assembly having:
• a first position adapted to seal the opening of the chamber;
• a second position adapted to allow at least a blade of a substrate handler to extend through the opening of the chamber;
• and
• a mounting mechanism coupled to the chamber;
• and
• a sensor system having a transmitter and a receiver adapted to detect a presence of a substrate and to communicate through at least a portion of the door assembly;
• and
• a controller coupled to the receiver, the controller having computer program code adapted to detect a presence of a substrate on a substrate handler and to determine whether the substrate is centered on a blade of the substrate handler.

A valve/sensor assembly comprising:

• a door assembly having:
• a first position adapted to seal an opening of a chamber;
• a second position adapted to allow at least a blade of a substrate handler to extend through the opening of the chamber;
• and
• a mounting mechanism adapted to couple the door assembly to the chamber, the mounting mechanism having a viewport;
• and
• a sensor system having a transmitter and a receiver adapted to detect a presence of a substrate and to communicate through the viewport of the mounting mechanism.

A system comprising:

• a chamber having an opening;
• a valve/sensor assembly coupled to the chamber, the valve/sensor assembly comprising:
• a door assembly having:
• a first position adapted to seal the opening of the chamber;
• a second position adapted to allow at least a blade of a substrate handler to extend through the opening of the chamber;
• and
• a mounting mechanism coupled to the chamber, the mounting mechanism having a viewport;
• and
• a sensor system having a transmitter and a receiver adapted to detect a presence of a substrate and to communicate through the viewport of the mounting mechanism;
• and
• a controller coupled to the receiver, the controller having computer program code adapted to detect a presence of a substrate on a substrate handler and to determine whether the substrate is centered on a blade of the substrate handler.